MEMSHD

 

DESCRIPTION:

  • The equipment is designed to provide a highly stable, ergonomic and flexible probing platform for precise analytical probing applications up to 200 mm, such as device and wafer characterizations, failure analysis (FA), RF/mmW and sub-THz probing, opto-engineering and MEMS.
  • The system has a fine-glide chuck stage on highly-stable granite base which is ideal for sub-micron probing, active platen cooling for thermal stability, solid structure, superior vibration attenuation, independent X-Y chuck stage movement, simple and easy to use microscope.

Probe2