Overview – 14AMI

The modern microchip industry is rapidly moving towards a new generation of ultra-miniaturised electronic components, known as 14-angstrom technology (1.4 nanometres) — dimensions tens of thousands of times smaller than the thickness of a human hair. At this atomic scale, even the smallest manufacturing imperfection can affect the operation of a processor.

As part of the European 14AMI project (14 Angstrom Module Integration), researchers at the Centre for Surface Science and Nanotechnology (CSSNT) of the National University of Science and Technology POLITEHNICA Bucharest (UPB) developed new, ultra-precise methods for nanoscale “quality control”, in collaboration with global leaders in the field (including imec and Thermo Fisher Scientific).

Main Results Achieved by the UPB Team:

Atomic-scale “X-rays” of next-generation chips: We refined a technique that allows us to extract extremely thin slices (less than 30 nanometres thick) from a chip’s structure and analyse them in detail. This enables us to measure material layers and pinpoint the location of each chemical element (such as silicon or germanium).

A new method combining two types of microscopy (Hybrid Metrology): For the first time at laboratory scale, we successfully combined two advanced investigation methods — electron-beam microscopy (TEM/SEM) and scanning probe microscopy (AFM-IR) — on exactly the same area of an ultrathin sample, without destroying it. This allows us to examine both the shape and internal structure of next-generation transistors (CFET) and their chemical composition, with a resolution better than 10 nanometres, revealing defects that conventional methods cannot detect.

Testing the materials used in chip patterning (EUV resists): We developed a rapid procedure for the chemical and topographical analysis of photosensitive materials used in extreme ultraviolet (EUV) lithography, an essential technology for manufacturing modern chips.

Internationally recognised scientific results: The research carried out within the project was validated through the publication of a scientific paper in a prestigious international journal (ACS Omega) and four presentations at scientific conferences. It also contributed to the training of master’s and doctoral students at POLITEHNICA Bucharest in the field of nanotechnology.

Why Do These Results Matter?

The methods developed at UPB help the semiconductor industry detect potential manufacturing defects at an early stage, contributing to the production of faster, more energy-efficient and more reliable chips for future technologies.