Project start announcement
14-Angstrom CMOS Technology acronym 14ACMOS,
funding contract no. G 2025-54059/390013/12.05.2025, SMIS2021 code: 338315
Politehnica University of Bucharest, located at Splaiul Independenței no. 313, Sector 6, Bucharest, is implementing during the period 12.05.2025 – 11.05.2026 the project 14-Angstrom CMOS Technology acronym 14ACMOS, funding contract no. G 2025-54059/390013/12.05.2025, SMIS2021 code: 338315, co-financed by the European Union through the Intelligent Growth Programme, Digitization and Financial Instruments (POCIDIF 2021-2027), Priority 1: Supporting and promoting an attractive and competitive RDI system in Romania, Specific Objective: OS a(i) Development and enhancement of research and innovation capacities and the adoption of advanced technologies, Action 1.3: Integration of the national RDI ecosystem into the European and international Research Area, Measure 1.3.1 Financing projects aiming at synergies with HE actions and other European programmes, Call for projects: Financing projects aiming at synergies with Horizon Europe actions and other European programmes.
The general objective of the 14ACMOS project is to explore and implement solutions for the manufacturing technology of 14-Angstrom CMOS chips, addressing: Lithography, Metrology, Mask infrastructure and Process technology. The specific objectives of the project are:
1 Development of new and refined metrology techniques for assessing the degradation of masks used in EUV (extreme ultraviolet) exposure processes;
2 Generation of knowledge and process technologies for removing particles present on the surface of EUV masks;
3 Study of the impact of EUV exposure and H₂ plasma conditions on repaired and remediated mask samples; The project implementation period is 12 months, from 12 May 2025 to 11 May 2026. The total project value is 8,807,641.50 lei, of which the non-reimbursable financial assistance is 8,807,641.50 lei, including ERDF 3,523,056.60 lei.
Contact details:
Contact person: ENĂCHESCU Marian
Position: Project Director
Tel./Fax: 0752003044, e-mail: marius.enachescu@cssnt-upb.ro
“Project co-financed by the European Union”